High-purity Rare Earth Metal and Alloy Targets Series - Scandium Target（Sc）

Purity：2N5~3N5(absolute purity)

Packaging Method: vacuum packaging, paper box or aircraft box sealing

 

Standard Model:

Standard		Hunan Rare Earth Standard
Grade		Sc-3Na5-T	Sc-3Na-T	Sc-2Na5-T
Sc, no less than(%)		99.95	99.9	99.5
Sc/RE， no less than(%)		99.999	99.99	99.95
The impurity content shall not exceed (ppm)	Al	30	50	100
	Si	20	30	50
	Fe	50	120	200
	Ca	30	50	100
	Cu	20	30	50
	Cr	10	30	50
	Ni	50	80	150
	Mn	20	30	50
	Ta	20	30	50
	W	10	20	30
	C	100	150	300
	O	200	300	500
Biding Mode		Indium solder bonding
Typical Specifications	Square Target	101.6*101.6*6mm，270*120*6mm，320*100*8mm
	Round Target	Φ50.8*5mm, Φ76.2*5mm, Φ101.6*5mm, Φ203.2*6mm, Φ327.7*5mm, Φ332*7mm

   

 

Product application:

It is used for the preparation of AlScN piezoelectric films for RF devices and MEMS by PVD dual-target magnetron sputtering, as well as the new generation of AlScN ferroelectric films for storage.

 

Technical advantages:

1. Using high purity scandium metal as raw materials, product purity as high as 3N5 absolutely, key impurity control strictly, O≤200ppm，Fe≤100ppm;

2. The average grain size < 200 microns;

3. Support custom non-standard size production.