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TRHigh-purity Rare Earth Metal and Alloy Targets Series: Aluminum-Scandium Alloy Target（Al-Sc）
Purity：≥3N5
Packaging Method: Vacuum packaging, paper box or aircraft box sealing
Standard Model:
|
Standard |
Hunan Rare Earth |
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|
Grade |
Al-Sc9.6a-T |
Al-Sc13a-T |
Al-Sc20a-T |
Al-Sc30a-T |
Al-Sc40a-T |
|
|
Sc Content(at%) |
9.6±0.5 |
13±0.5 |
20±0.5 |
30±1.0 |
40±1.0 |
|
|
The impurity content shall not exceed (ppm) |
Si |
30 |
30 |
50 |
50 |
50 |
|
Fe |
30 |
50 |
50 |
100 |
100 |
|
|
Ca |
10 |
10 |
10 |
10 |
10 |
|
|
Cu |
20 |
20 |
30 |
30 |
30 |
|
|
Cr |
10 |
10 |
10 |
10 |
10 |
|
|
Ni |
30 |
30 |
30 |
50 |
50 |
|
|
Mn |
10 |
10 |
10 |
10 |
10 |
|
|
Nb |
10 |
10 |
10 |
10 |
10 |
|
|
Ta |
20 |
20 |
30 |
30 |
30 |
|
|
W |
20 |
20 |
30 |
30 |
30 |
|
|
C |
100 |
100 |
100 |
200 |
200 |
|
|
O |
200 |
200 |
200 |
300 |
300 |
|
|
Binding Mode |
Diffusion welding of aluminum alloy back plates |
Indium welding of copper alloy back |
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|
Typical Specifications |
Square Target |
101.6*101.6*6mm，270*120*6mm，320*100*8mm |
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|
Round Target |
Φ50.8*5mm(2inches），Φ76.2*5mm（3inches），Φ101.6*5mm（4inches），Φ203.2*6mm（8inches），Φ327.7*5mm（12.9inches），Φ332*7mm（13inches） |
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Product Application:
Al-Sc alloy is used for PVD magnetron sputtering to prepare AlScN piezoelectric films for RF devices and MEMS, as well as for the new generation of AlScN ferroelectric films for storage.
Technical Advantages:
1. 3N5 or higher purity and impurity content O 300 PPM or less, Fe 100 PPM or less;
2. The product is of uniform composition and small deviation, and the average grain size < 200 microns;
Custom non-standard components and size are acceptable.
